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1. 355nm UV laser, long-time stable performance, good light spot
2. Reliable and high-precision X-Y-Z-θ worktable, excellent accelerating and decelerating performance, improved productivity
3. Wafer fixation via vacuum absorption during platform movement
4. Wafer positioning via wafer markpoint positioning for cutting precision assurance
5. High-efficient and flexible software operation system with simple-concise interface
6. Automatic loading/unloading, robot carrying and automatic edge searching
Applicable to 2 inch, 4 inch, 8 inch and 12 inch wafer cutting
Machine model | HDZ-WUVC100 | HDZ-WUVC200 |
Laser power | 15W | 15W |
Laser wavelength | 355nm | 355nm |
XY axis repeated positioning precision | ±1µm | ±1µm |
θ axis repeated positioning precision | ±15s | ±15s |
Cutting line width | >15µm | >15µm |
Cutting depth | >25µm | >25µm |
Cutting speed (*The cutting speed varies from different products) | 100mm/s | 100mm/s |
Loading and unloading mode | Manual | Robot carrying; automatic edge searching |
Processing product type | 2 inch-12 inch wafers | 2 inch-12 inch wafers |
Supply Voltage, Electricity Demand | AC 220V,50Hz | AC 220V,50Hz |