HTS800

Laser Resistor Trimming Equipment

HTS800

Machine Features

1. Self-developed PMU measurement system with resistance measurement accuracy as high as ±0.05%

2. Self-developed resistance adjustment software system supporting various resistance adjustment knife types and customer customized needs

3. Powerful functions including parameter modification such as resistance, AC and DC voltage and current modification

4. Stable and reliable performance, with high‑reliability and non‑drifting adjusted product parameter values

5. Low operation and maintenance costs, high overall machine efficiency, low energy consumption, and built-in protection functions.

Applications

Laser Trimming Systems are widely applied in thin-film circuits and precision thin-film resistors, including laser trimming of thin-film resistor wafers. These thin-film resistors are utilized in precision electronic circuits such as: couplers, filters, attenuators, terminators, amplifiers

Laser trimming equipment can be used for thick-film resistor value adjustment and functional trimming of thick-film circuits. Thick-film circuits have widespread applications in industrial electronics and power electronics, automotive electronics, sensors and instrumentation, computer and communication electronics, consumer electronics and medical devices, aerospace and other fields.

Brief Description

Laser Resistor Trimming is a computer-controlled process that utilizes a laser beam to precisely cut resistors for resistance value adjustment, while simultaneously monitoring the resistance in real-time through a high-speed measurement system, thereby achieving precision resistor trimming.
Technical Data Sheet

Model configuration

HTS800-RH/ HTS801-RH

Laser system

Laser type

fiber-optic laser/UV laser

Wave length

1064nm/355nm

Output Power

20W/1W~4W

repeat frequency

1-100kHz/1-500kHz

Pulse Width

3-500ns/<50ns

Optical system

type

High speed galvanometer

Typical spot size

15-40 μm/6 -15 μm

Scan range

70mm×70mm/30mm×30mm

Scan resolution

1μm

Repeatability

±2μm

Vision system

coaxial monitoring

5 million Pixel industrial camera

paraxial  positioning

(optional)

5 million Pixel industrial camera  with intelligent vision controller

workbench

Platform type

Linear motor with grating scale

X/Y range

300mm×300mm

Repeatability

±2μm

Loading stage

Electric adjustment, rotation range: ±5°

Processing substrate size (can be customized)

100mm×100mm

measuring system

compatibility

low, medium and high resistance measurements

Measurement Way

2-wire or 4-wire

Resistance

scope:100mΩ~100MΩ

Low: ±【0.05%+0.5%/R(Ω)】

Medium: ±0.05%

High: ±【0.05% +0.05% x R(MΩ)】

Voltage

range -10V~+150V

Full Scale accuracy 0.01%

Measuring channel

48 (Scalable to 144)

measure time

3us/time, can be adjusted according to customer needs

error compensation

One-click automatic calibration


Laser Marking Effects