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1.Femtosecond pulse
2.High pulse energy and peak power
3.Near-diffraction-limited beam quality
4.High stability and reliability
This laser adopts advanced chirped pulse amplification technology to deliver near-diffraction-limited femtosecond laser output. It has been mass applied in semiconductor and consumer electronics industries with superior process performance and high stability.
Application Scope:
Cutting, drilling and scribing (glass, silicon, ceramics, flexible printed circuit boards)
Thin film patterning (metals, thin films)
Marking (glass, silicon, ceramics, metals, plastics)
Parameters | Parameter values | Remarks |
Operation Mode | Pulse | |
Average Power(W) | 50w@600kHz | 20w@100kHz |
Central Wavelength(nm) | 1030 | |
Linewidth(nm) | <3 | 3dB Linewidth |
Repetition Frequency(kHz) | 50-2000 | Adjustable |
Pulse Width(fs) | 600-30000fs | Customizable |
Maximum Single Pulse Energy(uJ) | 200 | |
Power Adjustment Range(%) | 0-100 | |
Response Time(us) | <100 | |
Beam Quality(M2) | ≤1.3 | |
Power Stability(%) | ≤2% | 24h |
Spot Size(mm) | 2.5±0.3 | 1/e2 |
Spot Ellipticity(%) | >90 | Typ.93% |
Beam Offset(mm) | <1.0 | |
Beam Divergence Angle(mrad) | <0.5 |